Invention Grant
- Patent Title: High energy ion implanter, beam current adjuster, and beam current adjustment method
- Patent Title (中): 高能离子注入机,束流调节器和束流调节方法
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Application No.: US14996032Application Date: 2016-01-14
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Publication No.: US09576771B2Publication Date: 2017-02-21
- Inventor: Kouji Inada , Kouji Kato
- Applicant: Sumitomo Heavy Industries Ion Technology Co., Ltd.
- Applicant Address: JP Tokyo
- Assignee: Sumitomo Heavy Industries Ion Technology Co., Ltd.
- Current Assignee: Sumitomo Heavy Industries Ion Technology Co., Ltd.
- Current Assignee Address: JP Tokyo
- Agency: Michael Best & Friedrich LLP
- Priority: JP2013-240647 20131121
- Main IPC: H01J37/09
- IPC: H01J37/09 ; H01J37/08 ; H01J37/304 ; H01J37/317 ; H01J37/04

Abstract:
A beam current adjuster for an ion implanter includes a variable aperture device which is disposed at an ion beam focus point or a vicinity thereof. The variable aperture device is configured to adjust an ion beam width in a direction perpendicular to an ion beam focusing direction at the focus point in order to control an implanting beam current. The variable aperture device may be disposed immediately downstream of a mass analysis slit. The beam current adjuster may be provided with a high energy ion implanter including a high energy multistage linear acceleration unit.
Public/Granted literature
- US20160133439A1 HIGH ENERGY ION IMPLANTER, BEAM CURRENT ADJUSTER, AND BEAM CURRENT ADJUSTMENT METHOD Public/Granted day:2016-05-12
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