Invention Grant
- Patent Title: Graphene sensor and method of fabricating the same and touch-sensitive display device
- Patent Title (中): 石墨烯传感器及其制造方法和触敏显示装置
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Application No.: US14802752Application Date: 2015-07-17
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Publication No.: US09551937B2Publication Date: 2017-01-24
- Inventor: Yunping Di , Zhen Liu
- Applicant: BOE TECHNOLOGY GROUP CO., LTD.
- Applicant Address: CN Beijing
- Assignee: BOE TECHNOLOGY GROUP CO., LTD.
- Current Assignee: BOE TECHNOLOGY GROUP CO., LTD.
- Current Assignee Address: CN Beijing
- Agency: Kinney & Lange, P.A.
- Priority: CN201510015480 20150112
- Main IPC: G03F7/42
- IPC: G03F7/42 ; G03F7/16 ; G03F7/20 ; G03F7/32 ; G06F3/041 ; H05K1/09

Abstract:
The present disclosure provides a method of fabricating a graphene touch sensor, a graphene sensor and a touch-sensitive display device. The method comprises: forming a graphene layer on a substrate; forming a metal layer on the graphene layer; coating a photoresist layer on the metal layer; exposing the photoresist layer by using a gray-scale reticle and developing the exposed photoresist layer to obtain a photoresist completely removed region, a photoresist partially remained region, and a photoresist completely remained region; removing the metal layer located in the photoresist completely removed region; removing the graphene layer located in the photoresist completely removed region; removing the metal layer located in the photoresist partially remained region; coating a protective film on the graphene layer located in the photoresist partially remained region; striping off the remainder photoresist. The embodiment of the present disclosure avoids the alkaline developing solution and the alkaline stripping solution from contacting the graphene film to degrade the conduction of the graphene, thereby increasing yield and reducing cost.
Public/Granted literature
- US20160202613A1 GRAPHENE SENSOR AND METHOD OF FABRICATING THE SAME AND TOUCH-SENSITIVE DISPLAY DEVICE Public/Granted day:2016-07-14
Information query
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