Invention Grant
- Patent Title: Nonvolatile memory device and method for manufacturing same
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Application No.: US14860349Application Date: 2015-09-21
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Publication No.: US09490429B2Publication Date: 2016-11-08
- Inventor: Yoshitaka Sasago , Masaharu Kinoshita , Mitsuharu Tai , Akio Shima , Kenzo Kurotsuchi , Takashi Kobayashi
- Applicant: Hitachi, Ltd.
- Applicant Address: JP Tokyo
- Assignee: Hitachi, Ltd.
- Current Assignee: Hitachi, Ltd.
- Current Assignee Address: JP Tokyo
- Agency: Miles & Stockbridge P.C.
- Main IPC: H01L45/00
- IPC: H01L45/00 ; H01L27/06 ; H01L27/102 ; H01L29/792 ; H01L27/24 ; H01L27/115 ; G11C13/00

Abstract:
When a thin channel semiconductor layer formed on a side wall of a stacked film in which insulating films and gate electrodes are alternately stacked together is removed on the stacked film, a contact resistance between a vertical transistor including the channel semiconductor layer and the gate electrode, and a bit line formed on the stacked film is prevented from rising. As its means, a conductive layer electrically connected to the channel semiconductor layer is disposed immediately above the stacked film.
Public/Granted literature
- US20160079529A1 NONVOLATILE MEMORY DEVICE AND METHOD FOR MANUFACTURING SAME Public/Granted day:2016-03-17
Information query
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