Invention Grant
- Patent Title: Nanometer magnetic multilayer film for temperature sensor and manufacturing method therefor
- Patent Title (中): 用于温度传感器的纳米磁性多层膜及其制造方法
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Application No.: US15046911Application Date: 2016-02-18
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Publication No.: US09484527B2Publication Date: 2016-11-01
- Inventor: Xiufeng Han , Zhonghui Yuan , Pan Liu , Guoqiang Yu , Jiafeng Feng , Dianlin Zhang
- Applicant: Institute of Physics, Chinese Academy of Sciences
- Applicant Address: CN Beijing
- Assignee: INSTITUTE OF PHYSICS, CHINESE ACADEMY OF SCIENCES
- Current Assignee: INSTITUTE OF PHYSICS, CHINESE ACADEMY OF SCIENCES
- Current Assignee Address: CN Beijing
- Agency: Dentons US LLP
- Agent Peter Su
- Priority: CN201310534781 20131101
- Main IPC: H01L43/08
- IPC: H01L43/08 ; H01L43/12 ; G01K7/36 ; H01F10/32 ; G01K7/38 ; H01L43/02
Abstract:
A magnetic multilayer film for a temperature sensor is disclosed. The magnetic multilayer film comprises: a bottom magnetic composite layer provided on a substrate, the bottom magnetic composite layer having a direct pinning structure, an indirect pinning structure, a synthetic ferromagnetic structure, or a synthetic anti-ferromagnetic structure; a spacer layer provided on the bottom magnetic composite layer; and a top magnetic composite layer provided on the spacer layer, the top magnetic composite layer having the direct pinning structure, the indirect pinning structure, the synthetic ferromagnetic structure, or the synthetic anti-ferromagnetic structure, wherein a ferromagnetic layer of the bottom magnetic composite layer closest to the spacer layer has a magnetic moment anti-parallel with that of a ferromagnetic layer of the top magnetic composite layer closest to the spacer layer.
Public/Granted literature
- US20160163965A1 NANOMETER MAGNETIC MULTILAYER FILM FOR TEMPERATURE SENSOR AND MANUFACTURING METHOD THEREFOR Public/Granted day:2016-06-09
Information query
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