Invention Grant
- Patent Title: Photoresist composition, compound, and production method thereof
- Patent Title (中): 光刻胶组合物,化合物及其制备方法
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Application No.: US14491286Application Date: 2014-09-19
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Publication No.: US09477149B2Publication Date: 2016-10-25
- Inventor: Hayato Namai , Norihiko Ikeda , Takanori Kawakami
- Applicant: JSR CORPORATION
- Applicant Address: JP Minato-ku
- Assignee: JSR CORPORATION
- Current Assignee: JSR CORPORATION
- Current Assignee Address: JP Minato-ku
- Agency: Oblon, McClelland, Maier & Neustadt, L.L.P.
- Priority: JP2012-062856 20120319; JP2012-180604 20120816
- Main IPC: G03F7/039
- IPC: G03F7/039 ; C07C381/12 ; C07C309/25 ; G03F7/027 ; C07D307/93 ; C07D307/94 ; C07D311/74 ; C07D313/06 ; C07D317/24 ; C07D319/06 ; C07D321/12 ; C07D327/04 ; C07C309/17 ; C07D237/04 ; C07D237/16 ; C07D493/10 ; C07D207/416 ; C07D211/46 ; C07D295/18 ; C07D307/33 ; C07D307/64 ; C07C309/27 ; G03F7/004 ; G03F7/11 ; G03F7/20 ; G03F7/038

Abstract:
A photoresist composition containing (A) a polymer having a structural unit (I) that includes an acid-labile group, and (I) a compound represented by the following formula (1). In the following formula (1), R1, R2, R3 and R represent a hydrogen atom or a monovalent organic group having 1 to 20 carbon atoms. X represents a single bond, an oxygen atom or —NRa—. Ra represents a hydrogen atom, a hydroxy group or a monovalent organic group having 1 to 20 carbon atoms, and optionally taken together represents a ring structure by binding with R each other. A− represents —SO3− or —CO2−. M+ represents a monovalent onium cation.
Public/Granted literature
- US20150004545A1 PHOTORESIST COMPOSITION, COMPOUND, AND PRODUCTION METHOD THEREOF Public/Granted day:2015-01-01
Information query
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