发明授权
- 专利标题: Cleaning electroplating substrate holders using reverse current deplating
- 专利标题(中): 使用反向电流脱落清洁电镀基板支架
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申请号: US13853935申请日: 2013-03-29
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公开(公告)号: US09476139B2公开(公告)日: 2016-10-25
- 发明人: Lee Peng Chua , Steven T. Mayer , Thomas A. Ponnuswamy , Santosh Kumar
- 申请人: Novellus Systems, Inc.
- 申请人地址: US CA Fremont
- 专利权人: Novellus Systems, Inc.
- 当前专利权人: Novellus Systems, Inc.
- 当前专利权人地址: US CA Fremont
- 代理机构: Weaver Austin Villeneuve & Sampson LLP
- 主分类号: C25F1/00
- IPC分类号: C25F1/00 ; C25D17/00 ; C25D17/06 ; C25D21/00 ; C25D21/12
摘要:
Provided are cleaning methods and systems to remove unintended metallic deposits from electroplating apparatuses using reverse current deplating techniques. Such cleaning involves positioning a cleaning (deplating) disk in an electroplating cup similar to a regular processed substrate. The front surface of the cleaning disk includes a corrosion resistant conductive material to form electrical connections to deposits on the cup's surfaces. The disk is sealed in the cup and submerged into a plating solution. A reverse current is then applied to the front conductive surface of the disk to initiate deplating of the deposits. Sealing compression in the cup may change during cleaning to cause different deformation of the lip seal and to form new electrical connections to the deposits. The proposed cleaning may be applied to remove deposits formed during electroplating of alloys, in particular, tin-silver alloys widely used for semiconductor and wafer level packaging.
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