发明授权
- 专利标题： RTP lamp base with removal features
- 专利标题（中）： RTP灯座具有去除功能
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申请号： US14252430申请日： 2014-04-14
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公开(公告)号： US09462636B2公开(公告)日： 2016-10-04
- 发明人: Joseph M. Ranish , Douglas R. McAllister
- 申请人： Applied Materials, Inc.
- 申请人地址： US CA Santa Clara
- 专利权人： APPLIED MATERIALS, INC.
- 当前专利权人： APPLIED MATERIALS, INC.
- 当前专利权人地址： US CA Santa Clara
- 代理机构： Patterson & Sheridan, LLP
- 主分类号： H05B3/00
- IPC分类号： H05B3/00
摘要：
A lamp device for thermal processing of a substrate is provided. The lamp device includes a bulb enclosing a filament, the filament having a pair of leads. The lamp device further includes a lamp base. The lamp base includes a seal connecting the bulb to the lamp base; a sleeve having one or more walls and two ends with one end surrounding the seal; a potting compound filling the sleeve; one or more wires distributed through the sleeve and the potting compound and coupled to the pair of leads; and one or more hookable features located within 10 mm of the sealing end.
公开/授权文献
- US20150189697A1 RTP LAMP BASE IMPROVEMENT 公开/授权日：2015-07-02
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