Invention Grant
- Patent Title: Stack type image sensor
- Patent Title (中): 堆叠式图像传感器
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Application No.: US14602427Application Date: 2015-01-22
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Publication No.: US09455284B2Publication Date: 2016-09-27
- Inventor: Byung-Jun Park , Seung-Hun Shin , Chang-Rok Moon , Tae-Seok Oh , June-Taeg Lee
- Applicant: Samsung Electronics Co., Ltd.
- Applicant Address: KR Samsung-ro, Yeongtong-gu, Suwon-si, Gyeonggi-do
- Assignee: SAMSUNG ELECTRONICS CO., LTD.
- Current Assignee: SAMSUNG ELECTRONICS CO., LTD.
- Current Assignee Address: KR Samsung-ro, Yeongtong-gu, Suwon-si, Gyeonggi-do
- Agency: Muir Patent Law, PLLC
- Priority: KR10-2014-0009164 20140124
- Main IPC: H01L27/146
- IPC: H01L27/146

Abstract:
A stack type image sensor may include: a first chip including a via isolation trench penetrating a first substrate, a via isolation layer including an insulation material in the via isolation trench, a first conductive layer on the first substrate, and a first insulation layer; a second chip including a second conductive layer on a second substrate, and a second insulation layer contacting the first insulation layer; a first via trench penetrating the first substrate to expose the second conductive layer with respect to the trench; and a first through via formed in the first via trench, and including a third conductive layer insulated from the first substrate by the via isolation layer, the third conductive layer electrically connecting the first conductive layer to the second conductive layer. The third conductive layer may be formed in the via isolation trench.
Public/Granted literature
- US20150311241A1 STACK TYPE IMAGE SENSOR Public/Granted day:2015-10-29
Information query
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