Invention Grant
- Patent Title: Vertical bit line wide band gap TFT decoder
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Application No.: US14793167Application Date: 2015-07-07
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Publication No.: US09443907B2Publication Date: 2016-09-13
- Inventor: Peter Rabkin , Masaaki Higashitani
- Applicant: SanDisk 3D LLC
- Applicant Address: US TX Plano
- Assignee: SanDisk Technologies LLC
- Current Assignee: SanDisk Technologies LLC
- Current Assignee Address: US TX Plano
- Agency: Vierra Magen Marcus LLP
- Main IPC: H01L27/24
- IPC: H01L27/24 ; H01L21/02 ; H01L27/12 ; G11C13/00 ; H01L29/786 ; H01L45/00 ; H01L29/24 ; H01L29/66

Abstract:
A 3D memory array having a vertically oriented thin film transistor (TFT) selection device that has a body formed from a wide energy band gap semiconductor is disclosed. The wide energy band gap semiconductor may be an oxide semiconductor, such as a metal oxide semiconductor. As examples, this could be an InGaZnO, InZnO, HfInZnO, or ZnInSnO body. The source and drains can also be formed from the wide energy band gap semiconductor, although these may be doped for better conduction. The vertically oriented TFT selection device serves as a vertical bit line selection device in the 3D memory array. A vertical TFT select device has a high drive current, a high breakdown voltage and low leakage current.
Public/Granted literature
- US20150311256A1 Vertical Bit Line Wide Band Gap TFT Decoder Public/Granted day:2015-10-29
Information query
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