发明授权
- 专利标题: Support cylinder for thermal processing chamber
- 专利标题(中): 支撑筒用于热处理室
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申请号: US14298389申请日: 2014-06-06
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公开(公告)号: US09385004B2公开(公告)日: 2016-07-05
- 发明人: Mehran Behdjat , Aaron Muir Hunter , Joseph M. Ranish , Norman Tam , Jeffrey Tobin , Jiping Li , Martin Tran
- 申请人: Applied Materials, Inc.
- 申请人地址: US CA Santa Clara
- 专利权人: APPLIED MATERIALS, INC.
- 当前专利权人: APPLIED MATERIALS, INC.
- 当前专利权人地址: US CA Santa Clara
- 代理机构: Patterson & Sheridan, LLP
- 主分类号: H01L21/683
- IPC分类号: H01L21/683 ; H01L21/324 ; F16C13/00 ; B05D7/22 ; H01L21/67 ; H01L21/687
摘要:
Embodiments of the disclosure generally relate to a support cylinder used in a thermal process chamber. In one embodiment, the support cylinder comprises a ring body having an inner peripheral surface and an outer peripheral surface, wherein the ring body comprises an opaque quartz glass material and wherein the ring body is coated with an optical transparent layer. The optical transparent layer has a coefficient of thermal expansion that is substantially matched or similar to the opaque quartz glass material to reduce thermal expansion mismatch that may cause thermal stress under high thermal loads. In one example, the opaque quartz glass material is synthetic black quartz and the optical transparent layer comprises a clear fused quartz material.
公开/授权文献
- US20150050819A1 SUPPORT CYLINDER FOR THERMAL PROCESSING CHAMBER 公开/授权日:2015-02-19
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