Invention Grant
US09377394B2 Distinguishing foreign surface features from native surface features 有权
区分异常表面特征与原生表面特征

Distinguishing foreign surface features from native surface features
Abstract:
Provided herein is an apparatus, including a photon detector array; and a processing means configured for processing photon-detector-array signals corresponding to a first set of photons scattered from surface features of an article focused in a first focal plane and a second set of photons scattered from surface features of an article focused in a second focal plane, wherein the processing means is further configured for distinguishing foreign surface features of the article from foreign native features of the article.
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