- 专利标题: Semiconductor device
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申请号: US14541165申请日: 2014-11-14
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公开(公告)号: US09368638B2公开(公告)日: 2016-06-14
- 发明人: Shunpei Yamazaki , Takahiro Tsuji , Teruaki Ochiai , Koji Kusunoki , Hidekazu Miyairi
- 申请人: Semiconductor Energy Laboratory Co., Ltd.
- 申请人地址: JP Kanagawa-ken
- 专利权人: Semiconductor Energy Laboratory Co., Ltd.
- 当前专利权人: Semiconductor Energy Laboratory Co., Ltd.
- 当前专利权人地址: JP Kanagawa-ken
- 代理机构: Robinson Intellectual Property Law Office
- 代理商 Eric J. Robinson
- 优先权: JP2009-276740 20091204
- 主分类号: H01L29/04
- IPC分类号: H01L29/04 ; H01L31/036 ; H01L31/0376 ; H01L31/20 ; H01L29/786 ; H01L29/45
摘要:
An object is to provide a highly reliable transistor and a semiconductor device including the transistor. A semiconductor device including a gate electrode; a gate insulating film over the gate electrode; an oxide semiconductor film over the gate insulating film; and a source electrode and a drain electrode over the oxide semiconductor film, in which activation energy of the oxide semiconductor film obtained from temperature dependence of a current (on-state current) flowing between the source electrode and the drain electrode when a voltage greater than or equal to a threshold voltage is applied to the gate electrode is greater than or equal to 0 meV and less than or equal to 25 meV, is provided.
公开/授权文献
- US20150069390A1 SEMICONDUCTOR DEVICE 公开/授权日:2015-03-12
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