Invention Grant
- Patent Title: Manufacturing method for semiconductor device
- Patent Title (中): 半导体器件的制造方法
-
Application No.: US14850589Application Date: 2015-09-10
-
Publication No.: US09368474B2Publication Date: 2016-06-14
- Inventor: Hiroaki Matsubara , Tomoshige Chikai , Kiminori Ishido , Takashi Nakamura , Hirokazu Honda , Hiroshi Demachi , Yoshikazu Kumagaya , Shotaro Sakumoto , Shinji Watanabe , Sumikazu Hosoyamada , Shingo Nakamura , Takeshi Miyakoshi , Toshihiro Iwasaki , Michiaki Tamakawa
- Applicant: J-DEVICES CORPORATION
- Applicant Address: JP Oita
- Assignee: J-DEVICES CORPORATION
- Current Assignee: J-DEVICES CORPORATION
- Current Assignee Address: JP Oita
- Agency: Typha IP LLC
- Priority: JP2014-185708 20140911
- Main IPC: H01L23/00
- IPC: H01L23/00 ; H01L25/065 ; H01L21/78 ; H01L21/56 ; H01L21/304

Abstract:
A manufacturing method for a semiconductor device of the present invention includes: preparing a semiconductor wafer including an electrode formed therein; electrically connecting a first semiconductor element formed in a semiconductor chip and the electrode formed in the semiconductor wafer; filling a gap between the semiconductor wafer and the semiconductor chip with a first insulating resin layer; forming a second insulating resin layer on the semiconductor wafer; grinding the second insulating resin layer and the semiconductor chip until a thickness of the semiconductor chip reaches a predetermined thickness; forming a first insulating layer on the second insulating resin layer and the semiconductor chip; forming a line on the first insulating layer connected with a conductive material filled an opening in the first insulating layer and the second insulating resin layer to expose the electrode; and grinding the semiconductor wafer until a thickness of the semiconductor wafer reaches a predetermined thickness.
Public/Granted literature
- US20160079204A1 MANUFACTURING METHOD FOR SEMICONDUCTOR DEVICE Public/Granted day:2016-03-17
Information query
IPC分类: