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发明授权
US09340759B2 Cleaning composition and method of manufacturing metal wiring using the same 有权
使用其制造金属布线的清洁组合物和方法

Cleaning composition and method of manufacturing metal wiring using the same
摘要：
A cleaning composition includes about 0.01 to about 5 wt % of a chelating agent; about 0.01 to about 0.5 wt % of an organic acid; about 0.01 to about 1.0 wt % of an inorganic acid; about 0.01 to about 5 wt % of an alkali compound; and deionized water.
摘要（中）：

清洁组合物包含约0.01至约5重量％的螯合剂; 约0.01至约0.5重量％的有机酸; 约0.01至约1.0重量％的无机酸; 约0.01至约5重量％的碱金属化合物; 和去离子水。

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