Invention Grant
- Patent Title: Method for creating S/TEM sample and sample structure
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Application No.: US14684825Application Date: 2015-04-13
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Publication No.: US09336985B2Publication Date: 2016-05-10
- Inventor: Jeffrey Blackwood , Stacey Stone
- Applicant: FEI Company
- Applicant Address: US OR Hillsboro
- Assignee: FEI Company
- Current Assignee: FEI Company
- Current Assignee Address: US OR Hillsboro
- Agency: Scheinberg & Associates, P.C.
- Agent Michael O. Scheinberg
- Main IPC: H01J37/28
- IPC: H01J37/28 ; H01J37/18 ; H01J37/20 ; H01J37/06 ; G01N23/04 ; G01N1/28 ; G01N1/06 ; G01N1/08 ; G01N1/32 ; H01J37/305 ; H01J37/26
Abstract:
An improved method and apparatus for S/TEM sample preparation and analysis. Preferred embodiments of the present invention provide improved methods for TEM sample creation, especially for small geometry (
Public/Granted literature
- US20150323429A1 METHOD FOR CREATING S/TEM SAMPLE AND SAMPLE STRUCTURE Public/Granted day:2015-11-12
Information query
