发明授权
- 专利标题: Device for amplifying a laser beam
- 专利标题(中): 用于放大激光束的装置
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申请号: US13804266申请日: 2013-03-14
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公开(公告)号: US09306367B2公开(公告)日: 2016-04-05
- 发明人: Joachim Schulz , Oliver Mueller
- 申请人: Trumpf Lasersystems for Semiconductor Manufacturing GmbH
- 申请人地址: DE Ditzingen
- 专利权人: TRUMPF Lasersystems for Semiconductor Manufacturing GmbH
- 当前专利权人: TRUMPF Lasersystems for Semiconductor Manufacturing GmbH
- 当前专利权人地址: DE Ditzingen
- 代理机构: Fish & Richardson P.C.
- 优先权: DE102012205308 20120330
- 主分类号: H01S3/07
- IPC分类号: H01S3/07 ; H01S3/10 ; H01S3/034 ; H01S3/223
摘要:
A device for amplifying a laser beam is provided. The device includes at least one amplifier chamber in which a laser-active material is provided, at least one transmitting optical member delimiting the amplifier chamber and being arranged at a tilt angle, α, with respect to a plane oriented perpendicularly with respect to an optical axis of the laser beam, and at least one detection unit. The laser beam is reflected by the transmitting optical member into a back reflected laser beam, and the detection unit is arranged such that it detects the back reflected laser beam.
公开/授权文献
- US20130272327A1 Device for Amplifying a Laser Beam 公开/授权日:2013-10-17
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