发明授权
- 专利标题: Semiconductor device structure and method for manufacturing the same
- 专利标题(中): 半导体器件结构及其制造方法
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申请号: US13266607申请日: 2011-08-10
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公开(公告)号: US09293377B2公开(公告)日: 2016-03-22
- 发明人: Huicai Zhong , Qingqing Liang , Haizhou Yin
- 申请人: Huicai Zhong , Qingqing Liang , Haizhou Yin
- 申请人地址: CN Beijing
- 专利权人: Institute of Microelectronics, Chinese Academy of Sciences
- 当前专利权人: Institute of Microelectronics, Chinese Academy of Sciences
- 当前专利权人地址: CN Beijing
- 代理机构: Westman, Champlin & Koehler, P.A.
- 优先权: CN201110198180 20110715
- 国际申请: PCT/CN2011/078221 WO 20110810
- 国际公布: WO2013/010340 WO 20130124
- 主分类号: H01L21/8234
- IPC分类号: H01L21/8234 ; H01L21/8238
摘要:
There are provided a semiconductor device structure and a method for manufacturing the same. The method comprises: forming at least one continuous gate line on a semiconductor substrate; forming a gate spacer surrounding the gate line; forming source/drain regions in the semiconductor substrate on both sides of the gate line; forming a conductive spacer surrounding the gate spacer; and performing inter-device electrical isolation at a predetermined region, wherein isolated portions of the gate line form gates of respective unit devices, and isolated portions of the conductive spacer form contacts of respective unit devices. Embodiments of the present disclosure are applicable to manufacture of contacts in integrated circuits.
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