Invention Grant
US09291455B2 Method for operating and/or for measuring a micromechanical device, and micromechanical device
有权
用于操作和/或测量微机械装置的方法和微机械装置
- Patent Title: Method for operating and/or for measuring a micromechanical device, and micromechanical device
- Patent Title (中): 用于操作和/或测量微机械装置的方法和微机械装置
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Application No.: US13918556Application Date: 2013-06-14
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Publication No.: US09291455B2Publication Date: 2016-03-22
- Inventor: Johannes Classen , Christoph Gauger , Patrick Wellner
- Applicant: Johannes Classen , Christoph Gauger , Patrick Wellner
- Applicant Address: DE Stuttgart
- Assignee: ROBERT BOSCH GMBH
- Current Assignee: ROBERT BOSCH GMBH
- Current Assignee Address: DE Stuttgart
- Agency: Kenyon & Kenyon LLP
- Priority: DE102012210144 20120615
- Main IPC: G01C19/56
- IPC: G01C19/56 ; G01C19/5719 ; G01C19/5747 ; G01C19/574

Abstract:
A method for operating and/or measuring a micromechanical device. The device has a first and second seismic mass which are movable by oscillation relative to a substrate; a first drive device for deflecting the first seismic mass and a second drive device for deflecting the second seismic mass, parallel to a drive direction in a first orientation; a third drive device for deflecting the first seismic mass, and a fourth drive device for deflecting the second seismic mass in parallel to the drive direction and according to a second orientation opposite from the first orientation; a first detection device for detecting drive motion of the first seismic mass; and a second detection device for detecting drive motion of the second seismic mass. A first and a second detection signal are generated by the first and second detection devices, the first detection signal being evaluated separately from the second detection signal.
Public/Granted literature
- US20130333469A1 METHOD FOR OPERATING AND/OR FOR MEASURING A MICROMECHANICAL DEVICE, AND MICROMECHANICAL DEVICE Public/Granted day:2013-12-19
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