Invention Grant
- Patent Title: Interconnect structure including a continuous conductive body
- Patent Title (中): 互连结构包括连续导电体
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Application No.: US14258175Application Date: 2014-04-22
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Publication No.: US09281263B2Publication Date: 2016-03-08
- Inventor: Ming Han Lee , Hai-Ching Chen , Hsiang-Huan Lee , Tien-I Bao , Chi-Lin Teng
- Applicant: Taiwan Semiconductor Manufacturing Co., Ltd.
- Applicant Address: TW Hsin-Chu
- Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.
- Current Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.
- Current Assignee Address: TW Hsin-Chu
- Agency: Eschweiler & Associates, LLC
- Main IPC: H01L23/48
- IPC: H01L23/48 ; H01L23/482 ; H01L21/768 ; H01L23/532 ; H01L23/528

Abstract:
Some embodiments of the present disclosure relate to an interconnect structure for connecting devices of a semiconductor substrate. The interconnect structure includes a dielectric layer over the substrate and a continuous conductive body passing through the dielectric layer. The continuous conductive body is made up of a lower body region and an upper body region. The lower body region has a first width defined between opposing lower sidewalls of the continuous conductive body, and the upper body region has a second width defined between opposing upper sidewalls of the continuous conductive body. The second width is less than the first width. A barrier layer separates the continuous conductive body from the dielectric layer.
Public/Granted literature
- US20140225261A1 INTERCONNECT STRUCTURE INCLUDING A CONTINUOUS CONDUCTIVE BODY Public/Granted day:2014-08-14
Information query
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