发明授权
- 专利标题： Gas-lift pumps for flowing and purifying molten silicon
- 专利标题（中）： 用于流动和净化熔融硅的气举泵
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申请号： US13039789申请日： 2011-03-03
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公开(公告)号： US09267219B2公开(公告)日： 2016-02-23
- 发明人: Peter L. Kellerman , Frederick Carlson
- 申请人： Peter L. Kellerman , Frederick Carlson
- 申请人地址： US MA Gloucester
- 专利权人： Varian Semiconductor Equipment Associates, Inc.
- 当前专利权人： Varian Semiconductor Equipment Associates, Inc.
- 当前专利权人地址： US MA Gloucester
- 主分类号： C30B15/06
- IPC分类号： C30B15/06 ; C30B11/00 ; C30B29/06 ; C03B29/08
摘要：
The embodiments herein relate to a sheet production apparatus. A vessel is configured to hold a melt of a material and a cooling plate is disposed proximate the melt. This cooling plate configured to form a sheet of the material on the melt. A pump is used. In one instance, this pump includes a gas source and a conduit in fluid communication with the gas source. In another instance, this pump injects a gas into a melt. The gas can raise the melt or provide momentum to the melt.
公开/授权文献
- US20110271897A1 GAS-LIFT PUMPS FOR FLOWING AND PURIFYING MOLTEN SILICON 公开/授权日：2011-11-10
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