发明授权
- 专利标题: Mask for evaporation, and method and apparatus for manufacturing the same
- 专利标题(中): 用于蒸发的掩模,及其制造方法和装置
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申请号: US12964706申请日: 2010-12-09
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公开(公告)号: US09259805B2公开(公告)日: 2016-02-16
- 发明人: Joon-Hyung Kim , Young-Geun Cho , Eui-Shin Shin , Jong-Heon Kim , Seung-Ho Choi , Cheol-Lae Roh , Chang-Mog Jo , Jae-Seok Park
- 申请人: Joon-Hyung Kim , Young-Geun Cho , Eui-Shin Shin , Jong-Heon Kim , Seung-Ho Choi , Cheol-Lae Roh , Chang-Mog Jo , Jae-Seok Park
- 申请人地址: KR Samsung-ro, Giheung-Gu, Yongin-si, Gyeonggi-Do
- 专利权人: Samsung Display Co., Ltd.
- 当前专利权人: Samsung Display Co., Ltd.
- 当前专利权人地址: KR Samsung-ro, Giheung-Gu, Yongin-si, Gyeonggi-Do
- 代理商 Robert E. Bushnell, Esq.
- 优先权: KR10-2009-0124209 20091214
- 主分类号: B32B37/04
- IPC分类号: B32B37/04 ; B05C11/11 ; B23K26/30 ; B23K26/03 ; B23K26/06 ; H01L51/00
摘要:
Provided is a mask for an evaporation apparatus, which includes a first division mask and a second division mask. The first and second division masks are directly bonded to each other by welding, thereby forming welding portion between the first and the second division masks. A method and apparatus for manufacturing a mask for evaporation are also provided. The division masks according to the embodiment do not use subframes, and are directly bonded to one another by welding, so that a shadow effect does not occur. The apparatus for manufacturing a mask for evaporation includes a work stage, a clamp fixing a first division mask and a second division mask to the work stage, and a laser welding part welding the first division mask to the second division mask. The apparatus may further include a first roller leading the laser welding part and a second roller following the laser welding part.
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