Invention Grant
- Patent Title: Apparatus for grinding a substrate and method of using the same
- Patent Title (中): 用于研磨基材的装置及其使用方法
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Application No.: US13728671Application Date: 2012-12-27
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Publication No.: US09199355B2Publication Date: 2015-12-01
- Inventor: Inho Lee , Hwankyeong Jeong , Jinwoo Kim , Goangyoung Park , Sanghoon Back , Eehyun An
- Applicant: Samsung Display Co., Ltd.
- Applicant Address: KR Yongin, Gyeonggi-Do
- Assignee: SAMSUNG DISPLAY CO., LTD.
- Current Assignee: SAMSUNG DISPLAY CO., LTD.
- Current Assignee Address: KR Yongin, Gyeonggi-Do
- Agency: F. Chau & Associates, LLC
- Priority: KR10-2012-0054443 20120522
- Main IPC: B24B49/12
- IPC: B24B49/12 ; B24B41/00 ; B24B9/10

Abstract:
An apparatus for grinding a substrate includes a stage part configured to support a substrate thereon, a grinding part, a camera part, a replacing part and a control unit. The grinding part includes a grinding wheel configured to grind an edge of the substrate. The camera part is configured to take a picture of the grinding wheel, analyze the picture of the grinding wheel and generate information about the grinding wheel. The replacing part includes a spare grinding wheel and is configured provide the spare grinding wheel to the grinding part or pick up the grinding wheel from the grinding part. The control unit is configured to receive the grinding wheel information from the camera part and offset compensate a position of the grinding wheel on the basis of the grinding wheel information or communicate with the replacing part to replace the grinding wheel on the basis of the grinding wheel information.
Public/Granted literature
- US20130316618A1 APPARATUS FOR GRINDING A SUBSTRATE AND METHOD OF USING THE SAME Public/Granted day:2013-11-28
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