Invention Grant
US09195069B2 Illumination optical apparatus, exposure apparatus, and device manufacturing method 有权
照明光学装置,曝光装置和装置的制造方法

Illumination optical apparatus, exposure apparatus, and device manufacturing method
Abstract:
An illumination optical apparatus has a beam splitting member which splits an incident beam into a first light beam and a second light beam to form a first illumination region and a second illumination region, a first light-guide optical system which guides the first light beam to the first illumination region, and a second light-guide optical system which guides the second light beam to the second illumination region locate apart from the first illumination region.
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