发明授权
US09163325B2 Crystal growth apparatus and manufacturing method of group III nitride crystal 有权
晶体生长装置及III族氮化物晶体的制造方法

Crystal growth apparatus and manufacturing method of group III nitride crystal
摘要:
A crystal growth apparatus comprises a reaction vessel holding a melt mixture containing an alkali metal and a group III metal, a gas supplying apparatus supplying a nitrogen source gas to a vessel space exposed to the melt mixture inside the reaction vessel, a heating unit heating the melt mixture to a crystal growth temperature, and a support unit supporting a seed crystal of a group III nitride crystal inside the melt mixture.
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