发明授权
- 专利标题: Structure and method for E-beam writing
- 专利标题(中): 电子束写入的结构和方法
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申请号: US13442635申请日: 2012-04-09
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公开(公告)号: US09136092B2公开(公告)日: 2015-09-15
- 发明人: Chi-Ta Lu , Jia-Guei Jou , Yi-Hsien Chen , Peng-Ren Chen , Dong-Hsu Cheng
- 申请人: Chi-Ta Lu , Jia-Guei Jou , Yi-Hsien Chen , Peng-Ren Chen , Dong-Hsu Cheng
- 申请人地址: TW Hsin-Chu
- 专利权人: Taiwan Semiconductor Manufacturing Company, Ltd.
- 当前专利权人: Taiwan Semiconductor Manufacturing Company, Ltd.
- 当前专利权人地址: TW Hsin-Chu
- 代理机构: Haynes and Boone, LLP
- 主分类号: G06F17/50
- IPC分类号: G06F17/50 ; G03F1/00 ; H01J37/317 ; G03F1/36 ; G03F1/70 ; H01J37/302 ; G03F7/20
摘要:
The present disclosure provides one embodiment of an integrated circuit (IC) method. The method includes receiving an IC design layout having a main feature; performing an optical proximity correction (OPC) process to the design layout; and thereafter, performing a jog reduction process to the design layout such that jog features of the design layout are reduced.
公开/授权文献
- US20130268901A1 Structure and Method for E-Beam Writing 公开/授权日:2013-10-10
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