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US09136092B2 Structure and method for E-beam writing 有权
电子束写入的结构和方法

Structure and method for E-beam writing
摘要:
The present disclosure provides one embodiment of an integrated circuit (IC) method. The method includes receiving an IC design layout having a main feature; performing an optical proximity correction (OPC) process to the design layout; and thereafter, performing a jog reduction process to the design layout such that jog features of the design layout are reduced.
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