发明授权
- 专利标题： Showerhead
- 专利标题（中）： 淋浴头
-
申请号： US13920744申请日： 2013-06-18
-
公开(公告)号： US09126214B2公开(公告)日： 2015-09-08
- 发明人: Chien-Ping Huang , Tsan-Hua Huang
- 申请人： HERMES-EPITEK CORPORATION
- 申请人地址： TW Taipei
- 专利权人： Hermes-Epitek Corporation
- 当前专利权人： Hermes-Epitek Corporation
- 当前专利权人地址： TW Taipei
- 代理机构： Stout, Uxa & Buyan, LLP
- 代理商 Donald E. Stout
- 优先权： TW99102945A 20100202
- 主分类号： H01L21/44
- IPC分类号： H01L21/44 ; H01L21/465 ; B05B1/14 ; B23P15/16 ; B05B1/18 ; H01L21/46 ; H01L21/4757
摘要：
A showerhead is disclosed in this invention. The showerhead includes a bottom portion, at least one plate, and a top portion. The bottom portion includes a plurality of gas tubes which are integratedly formed on the bottom portion. The gas tubes include at least one first gas tube. The at least one plate includes a first plate. The first plate includes a plurality of first openings, wherein the gas tubes pass through the first openings. The top portion is coupled to the bottom portion for forming at least one inner space.
公开/授权文献
- US20130277459A1 Showerhead 公开/授权日：2013-10-24
信息查询
IPC分类:
