发明授权
- 专利标题: Interface, a method for observing an object within a non-vacuum environment and a scanning electron microscope
- 专利标题(中): 界面,在非真空环境中观察物体的方法和扫描电子显微镜
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申请号: US14302221申请日: 2014-06-11
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公开(公告)号: US09076631B2公开(公告)日: 2015-07-07
- 发明人: Dov Shachal
- 申请人: Dov Shachal
- 代理机构: Stein IP, LLC
- 主分类号: H01J40/00
- IPC分类号: H01J40/00 ; H01J37/28 ; H01J37/20 ; H01J37/301
摘要:
An interface, a scanning electron microscope and a method for observing an object that is positioned in a non-vacuum environment. The method includes: passing at least one electron beam that is generated in a vacuum environment through at least one aperture out of an aperture array and through at least one ultra thin membrane that seals the at least one aperture; wherein the at least one electron beam is directed towards the object; wherein the at least one ultra thin membrane withstands a pressure difference between the vacuum environment and the non-vacuum environment; and detecting particles generated in response to an interaction between the at least one electron beam and the object.
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