发明授权
US09054026B2 Methods for manufacturing and manipulating semiconductor structure having active device
有权
用于制造和操纵具有有源器件的半导体结构的方法
- 专利标题: Methods for manufacturing and manipulating semiconductor structure having active device
- 专利标题(中): 用于制造和操纵具有有源器件的半导体结构的方法
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申请号: US14261478申请日: 2014-04-25
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公开(公告)号: US09054026B2公开(公告)日: 2015-06-09
- 发明人: Wing-Chor Chan , Li-Fan Chen
- 申请人: Macronix International Co., Ltd.
- 申请人地址: TW Hsinchu
- 专利权人: MACRONIX INTERNATIONAL CO., LTD.
- 当前专利权人: MACRONIX INTERNATIONAL CO., LTD.
- 当前专利权人地址: TW Hsinchu
- 代理机构: McClure, Qualey & Rodack, LLP
- 主分类号: H01L27/02
- IPC分类号: H01L27/02 ; H01L49/02 ; H01L21/8234 ; H01L29/808 ; H01L29/78 ; H01L27/06 ; H01L27/24 ; H01L29/06 ; H01L29/423 ; H01L29/08 ; H01L29/10
摘要:
A semiconductor structure comprising a substrate, an active device, a field oxide layer and a poly-silicon resistor is disclosed. The active device is formed in a surface area of the substrate. The active device has a first doped area, a second doped area and a third doped area. The second doped area is disposed on the first doped area. The first doped area is between the second and the third doped areas. The first doped area has a first type conductivity. The third doped area has a second type conductivity. The first and the second type conductivities are different. The field oxide layer is disposed on a part of the third doped area. The poly-silicon resistor is disposed on the field oxide layer and is electrically connected to the third doped area.
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