发明授权
- 专利标题： Chip sorting apparatus
- 专利标题（中）： 芯片分拣装置
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申请号： US14220060申请日： 2014-03-19
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公开(公告)号： US09011638B2公开(公告)日： 2015-04-21
- 发明人: Chen-Ke Hsu , Liang Sheng Chi , Chun-Chang Chen , Win-Jim Su , Hsu-Cheng Lin , Mei-Ling Tsai , Yi Lung Liu , Chen Ou
- 申请人： Epistar Corporation
- 申请人地址： TW Hsinchu
- 专利权人： Epistar Corporation
- 当前专利权人： Epistar Corporation
- 当前专利权人地址： TW Hsinchu
- 代理机构： Patterson & Sheridan, LLP
- 优先权： TW98124963A 20090723
- 主分类号： B32B38/10
- IPC分类号： B32B38/10 ; H01L21/66 ; H01L21/67
摘要：
A method of chip sorting comprises providing a chip holder having a first surface; providing multiple chips on the first surface; providing a chip receiver having a second surface, wherein the second surface faces the first surface; attaching the multiple chips to the second surface; decreasing an adhesion between the multiple chips and the first surface; and separating the multiple chips from the first surface after the step of decreasing the adhesion between the multiple chips and the first surface.
公开/授权文献
- US20140202627A1 CHIP SORTING APPARATUS 公开/授权日：2014-07-24
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