Invention Grant
- Patent Title: Interlayer design for epitaxial growth of semiconductor layers
- Patent Title (中): 用于半导体层外延生长的层间设计
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Application No.: US12405963Application Date: 2009-03-17
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Publication No.: US08981211B2Publication Date: 2015-03-17
- Inventor: Erol Girt , Mariana Rodica Munteanu
- Applicant: Erol Girt , Mariana Rodica Munteanu
- Applicant Address: US DE Wilmington
- Assignee: Zetta Research and Development LLC—AQT Series
- Current Assignee: Zetta Research and Development LLC—AQT Series
- Current Assignee Address: US DE Wilmington
- Agency: Mattingly & Malur, PC
- Main IPC: H01L31/00
- IPC: H01L31/00 ; H01L21/02 ; H01L31/0368 ; H01L31/0392 ; H01L31/068 ; H01L31/18

Abstract:
An interlayer structure that, in one implementation, includes a combination of an amorphous or nano-crystalline seed-layer, and one or more metallic layers, deposited on the seed layer, with the fcc, hcp or bcc crystal structure is used to epitaxially orient a semiconductor layer on top of non-single-crystal substrates. In some implementations, this interlayer structure is used to establish epitaxial growth of multiple semiconductor layers, combinations of semiconductor and oxide layers, combinations of semiconductor and metal layers and combination of semiconductor, oxide and metal layers. This interlayer structure can also be used for epitaxial growth of p-type and n-type semiconductors in photovoltaic cells.
Public/Granted literature
- US20090235983A1 Interlayer Design for Epitaxial Growth of Semiconductor Layers Public/Granted day:2009-09-24
Information query
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