发明授权
- 专利标题: Semiconductor-on-insulator device with asymmetric structure
- 专利标题(中): 具有不对称结构的绝缘体上半导体器件
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申请号: US14053986申请日: 2013-10-15
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公开(公告)号: US08912625B2公开(公告)日: 2014-12-16
- 发明人: Michel J. Abou-Khalil , Robert J. Gauthier, Jr. , Tom C. Lee , Junjun Li , Souvick Mitra , Christopher S. Putnam
- 申请人: International Business Machines Corporation
- 申请人地址: US NY Armonk
- 专利权人: International Business Machines Corporation
- 当前专利权人: International Business Machines Corporation
- 当前专利权人地址: US NY Armonk
- 代理机构: Wood, Herron & Evans LLP
- 代理商 Anthony J. Canale
- 主分类号: H01L27/02
- IPC分类号: H01L27/02 ; H01L27/12 ; H01L29/861 ; G06F17/50 ; H01L29/74 ; H01L29/66
摘要:
Device structures with a reduced junction area in an SOI process, methods of making the device structures, and design structures for a lateral diode. The device structure includes one or more dielectric regions, such as STI regions, positioned in the device region and intersecting the p-n junction between an anode and cathode. The dielectric regions, which may be formed using shallow trench isolation techniques, function to reduce the width of a p-n junction with respect to the width area of the cathode at a location spaced laterally from the p-n junction and the anode. The width difference and presence of the dielectric regions creates an asymmetrical diode structure. The volume of the device region occupied by the dielectric regions is minimized to preserve the volume of the cathode and anode.
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