发明授权
- 专利标题: Method of determining an amount of impurities that a contaminating material contributes to high purity silicon
- 专利标题(中): 确定污染物质对高纯度硅有贡献的杂质量的方法
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申请号: US13443466申请日: 2012-04-10
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公开(公告)号: US08895324B2公开(公告)日: 2014-11-25
- 发明人: Dennis DePesa , Jon Host , Troy Houthoofd , Alan Rytlewski
- 申请人: Dennis DePesa , Jon Host , Troy Houthoofd , Alan Rytlewski
- 申请人地址: US MI Hemlock
- 专利权人: Hemlock Semiconductor Corporation
- 当前专利权人: Hemlock Semiconductor Corporation
- 当前专利权人地址: US MI Hemlock
- 代理机构: Cantor Colburn LLP
- 主分类号: G01R31/26
- IPC分类号: G01R31/26 ; C01B33/021 ; F27B17/00 ; C30B33/02 ; C30B35/00 ; C01B33/037 ; C30B29/06 ; F27D19/00
摘要:
A method of determining an amount of impurities that a contaminating material contributes to high purity silicon including the step of partially encasing a sample of high purity silicon in the contaminating material. The sample encased in the contaminating material is heated within a furnace. A change in impurity content of the high purity silicon is determined after the step of heating, compared to an impurity content of the high purity silicon prior to the step of heating. A furnace for heat treating high purity silicon including a housing that defines a heating chamber. The housing is at least partially formed from low contaminant material that contributes less than 400 parts per trillion of impurities to the high purity silicon during heating at annealing temperatures for a sufficient period time to anneal the high purity silicon, and the furnace contributes an average of less than 400 parts per trillion of impurities to the high purity silicon under the same heating conditions.
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