Invention Grant
- Patent Title: Heat exchange pedestal with coating of diamond-like material
- Patent Title (中): 热交换基座，镀金刚石材料
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Application No.: US12896272Application Date: 2010-10-01
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Publication No.: US08852348B2Publication Date: 2014-10-07
- Inventor: Vijay D Parkhe , Kurt J Ahmann , Matthew C Tsai , Steve Sansoni
- Applicant: Vijay D Parkhe , Kurt J Ahmann , Matthew C Tsai , Steve Sansoni
- Applicant Address: US CA Santa Clara
- Assignee: Applied Materials, Inc.
- Current Assignee: Applied Materials, Inc.
- Current Assignee Address: US CA Santa Clara
- Agency: Janah & Associates, P.C.
- Agent Ashok K. Janah
- Main IPC: C23C16/00
- IPC: C23C16/00 ; H01L21/306 ; C23F1/00 ; H01L21/683 ; B23B31/38 ; H01L21/687
Abstract:
A substrate heat exchange pedestal comprises: (i) a support structure having a contact surface comprising a coating of a diamond-like material, and (ii) a heat exchanger in the support structure, the heat exchanger capable of heating or cooling a substrate.
Public/Granted literature
- US20110017424A1 HEAT EXCHANGE PEDESTAL WITH COATING OF DIAMOND-LIKE MATERIAL Public/Granted day:2011-01-27
Information query
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