发明授权
- 专利标题: Piezoelectric microphone fabricated on glass
- 专利标题(中): 压电麦克风在玻璃上制作
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申请号: US13221676申请日: 2011-08-30
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公开(公告)号: US08824706B2公开(公告)日: 2014-09-02
- 发明人: Philip Jason Stephanou , David William Burns
- 申请人: Philip Jason Stephanou , David William Burns
- 申请人地址: US CA San Diego
- 专利权人: Qualcomm MEMS Technologies, Inc.
- 当前专利权人: Qualcomm MEMS Technologies, Inc.
- 当前专利权人地址: US CA San Diego
- 代理机构: Weaver Austin Villeneuve & Sampson, LLP
- 主分类号: H04R25/00
- IPC分类号: H04R25/00 ; C03C17/36 ; H04R1/04 ; C03C27/08 ; C03C27/10 ; H04R1/06 ; H04R17/02 ; H04R19/04 ; H04R1/08 ; H04R19/00
摘要:
This disclosure provides systems, methods and apparatus for glass-encapsulated microphones. In one aspect, a glass-encapsulated microphone may include a glass substrate, an electromechanical microphone device, an integrated circuit device, and a cover glass. The cover glass may be bonded to the glass substrate with an adhesive, such as epoxy, or a metal bond ring. The cover glass may have any of a number of configurations. In some configurations, the cover glass may define an aperture for the electromechanical microphone device at an edge of the glass-encapsulated microphone. In some configurations, the cover glass may define a cavity to accommodate the integrated circuit device that is separate from a cavity that accommodates the electromechanical microphone device.
公开/授权文献
- US20130051586A1 PIEZOELECTRIC MICROPHONE FABRICATED ON GLASS 公开/授权日:2013-02-28
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