Invention Grant
US08809128B2 Methods and apparatus for layout of three dimensional matrix array memory for reduced cost patterning
有权
用于三维矩阵阵列存储器布局的方法和装置,用于降低成本图案化
- Patent Title: Methods and apparatus for layout of three dimensional matrix array memory for reduced cost patterning
- Patent Title (中): 用于三维矩阵阵列存储器布局的方法和装置,用于降低成本图案化
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Application No.: US12911900Application Date: 2010-10-26
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Publication No.: US08809128B2Publication Date: 2014-08-19
- Inventor: Roy E. Scheuerlein , Christopher J. Petti , Yoichiro Tanaka
- Applicant: Roy E. Scheuerlein , Christopher J. Petti , Yoichiro Tanaka
- Applicant Address: US CA Milpitas
- Assignee: SanDisk 3D LLC
- Current Assignee: SanDisk 3D LLC
- Current Assignee Address: US CA Milpitas
- Agency: Dugan & Dugan, PC
- Main IPC: H01L21/82
- IPC: H01L21/82 ; H01L27/24

Abstract:
The present invention provides apparatus, methods, and systems for a memory layer layout for a three-dimensional memory. The memory layer includes a plurality of memory array blocks; a plurality of memory lines coupled to the memory array blocks; and a plurality of zia contact areas for coupling the memory layer to other memory layers in a three-dimensional memory. The memory lines extend from the memory array blocks and are formed using a sidewall defined process. The memory lines have a half pitch dimension smaller than the nominal minimum feature size capability of a lithography tool used in forming the memory lines. The zia contact areas have a dimension that is approximately four times the half pitch dimension of the memory lines. The memory lines are arranged in a pattern adapted to allow a single memory line to intersect a single zia contact area and to provide area between other memory lines for other zia contact areas. Numerous additional aspects are disclosed.
Public/Granted literature
- US20110095438A1 METHODS AND APPARATUS FOR LAYOUT OF THREE DIMENSIONAL MATRIX ARRAY MEMORY FOR REDUCED COST PATTERNING Public/Granted day:2011-04-28
Information query
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