Invention Grant
US08809128B2 Methods and apparatus for layout of three dimensional matrix array memory for reduced cost patterning 有权
用于三维矩阵阵列存储器布局的方法和装置,用于降低成本图案化

Methods and apparatus for layout of three dimensional matrix array memory for reduced cost patterning
Abstract:
The present invention provides apparatus, methods, and systems for a memory layer layout for a three-dimensional memory. The memory layer includes a plurality of memory array blocks; a plurality of memory lines coupled to the memory array blocks; and a plurality of zia contact areas for coupling the memory layer to other memory layers in a three-dimensional memory. The memory lines extend from the memory array blocks and are formed using a sidewall defined process. The memory lines have a half pitch dimension smaller than the nominal minimum feature size capability of a lithography tool used in forming the memory lines. The zia contact areas have a dimension that is approximately four times the half pitch dimension of the memory lines. The memory lines are arranged in a pattern adapted to allow a single memory line to intersect a single zia contact area and to provide area between other memory lines for other zia contact areas. Numerous additional aspects are disclosed.
Information query
Patent Agency Ranking
0/0