Invention Grant
- Patent Title: Optical system polarizer calibration
- Patent Title (中): 光学系统偏光镜校准
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Application No.: US14034869Application Date: 2013-09-24
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Publication No.: US08797534B2Publication Date: 2014-08-05
- Inventor: Johannes D. de Veer , Leonid Poslavsky , G. Vera Zhuang , Shankar Krishnan
- Applicant: KLA-Tencor Corporation
- Applicant Address: US CA Milpitas
- Assignee: KLA-Tencor Corporation
- Current Assignee: KLA-Tencor Corporation
- Current Assignee Address: US CA Milpitas
- Agency: Luedeka Neely Group, P.C.
- Agent Rick Barnes
- Main IPC: G01J4/00
- IPC: G01J4/00

Abstract:
An apparatus to calibrate a polarizer in a polarized optical system at any angle of incidence. The apparatus decouples the polarization effect of the system from the polarization effect of the sample. The apparatus includes a substrate with a polarizer disposed on the surface. An indicator on the substrate indicates the polarization orientation of the polarizer, which is in a predetermined orientation with respect to the substrate.
Public/Granted literature
- US20140043608A1 Optical System Polarizer Calibration Public/Granted day:2014-02-13
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