Invention Grant
- Patent Title: Strain sensor element and blood pressure sensor
- Patent Title (中): 应变传感器元件和血压传感器
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Application No.: US13110392Application Date: 2011-05-18
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Publication No.: US08760154B2Publication Date: 2014-06-24
- Inventor: Alexander Devin Giddings , Hideaki Fukuzawa , Yoshihiko Fuji , Hiromi Yuasa , Michiko Hara , Shuichi Murakami
- Applicant: Alexander Devin Giddings , Hideaki Fukuzawa , Yoshihiko Fuji , Hiromi Yuasa , Michiko Hara , Shuichi Murakami
- Applicant Address: JP Tokyo
- Assignee: Kabushiki Kaisha Toshiba
- Current Assignee: Kabushiki Kaisha Toshiba
- Current Assignee Address: JP Tokyo
- Agency: Oblon, Spivak, McClelland, Maier & Neustadt, L.L.P.
- Priority: JP2010-223175 20100930
- Main IPC: G01B7/24
- IPC: G01B7/24 ; G01L1/00

Abstract:
A strain sensor element comprises a laminated film which has a magnetic free layer, a spacer layer, and a magnetic reference layer. The free layer has a variable magnetization direction and a out-of-plane magnetization direction. The reference layer has a variable magnetization direction which is pinned more strongly than the magnetization of the free layer. The spacer layer provided between the free layer and the reference layer. A pair of electrodes is provided with a plane of the laminated film. A substrate is provided with either of the pair electrodes and can be strained. The rotation angle of the magnetization of the free layer is different from the rotation angle of the magnetization of the reference layer when the substrate is distorted. Electrical resistance is changed depending on the magnetization angle between the free layer and the reference layer, which allows the element to operate as a strain sensor.
Public/Granted literature
- US20120079887A1 STRAIN SENSOR ELEMENT AND BLOOD PRESSURE SENSOR Public/Granted day:2012-04-05
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