发明授权
US08736404B2 Micromechanical digital capacitor with improved RF hot switching performance and reliability
有权
微机械数字电容，具有改进的射频热切换性能和可靠性
- 专利标题： Micromechanical digital capacitor with improved RF hot switching performance and reliability
- 专利标题（中）： 微机械数字电容，具有改进的射频热切换性能和可靠性
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申请号： US12896198申请日： 2010-10-01
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公开(公告)号： US08736404B2公开(公告)日： 2014-05-27
- 发明人: Richard L. Knipe , Robertus Petrus Van Kampen , Anartz Unamuno
- 申请人： Richard L. Knipe , Robertus Petrus Van Kampen , Anartz Unamuno
- 申请人地址： US CA San Jose
- 专利权人： Cavendish Kinetics Inc.
- 当前专利权人： Cavendish Kinetics Inc.
- 当前专利权人地址： US CA San Jose
- 代理机构： Patterson & Sheridan, LLP
- 主分类号： H01H51/22
- IPC分类号： H01H51/22 ; H01H57/00
摘要：
The present invention generally relates to RF MEMS devices that are capable of hot switching. The RF MEMS devices, by utilizing one or more spring mechanisms, are capable of hot switching. In certain embodiments, two or more sets of springs may be used that become engaged at specific points in the displacement of the cantilever of the MEMS device. The springs allow for a significant increase in the release voltage for a given pull in landing voltage.
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