Invention Grant
US08733172B2 Microelectromechanical gyroscope with rotary driving motion and improved electrical properties 有权
具有旋转驱动运动和改善电气特性的微机电陀螺仪

Microelectromechanical gyroscope with rotary driving motion and improved electrical properties
Abstract:
An integrated microelectromechanical structure is provided with: a die, having a substrate and a frame, defining inside it a detection region and having a first side extending along a first axis; a driving mass, anchored to the substrate, set in the detection region, and designed to be rotated in a plane with a movement of actuation about a vertical axis; and a first pair and a second pair of first sensing masses, suspended inside the driving mass via elastic supporting elements so as to be fixed with respect thereto in the movement of actuation and so as to perform a detection movement of rotation out of the plane in response to a first angular velocity; wherein the first sensing masses of the first pair and the first sensing masses of the second pair are aligned in respective directions, having non-zero inclinations of opposite sign with respect to the first axis.
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