Invention Grant
- Patent Title: Microelectromechanical gyroscope with rotary driving motion and improved electrical properties
- Patent Title (中): 具有旋转驱动运动和改善电气特性的微机电陀螺仪
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Application No.: US13789476Application Date: 2013-03-07
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Publication No.: US08733172B2Publication Date: 2014-05-27
- Inventor: Luca Coronato , Gabriele Cazzaniga , Sarah Zerbini
- Applicant: STMicroelectronics S.r.l.
- Applicant Address: IT Agrate Brianza
- Assignee: STMicroelectronics S.r.l.
- Current Assignee: STMicroelectronics S.r.l.
- Current Assignee Address: IT Agrate Brianza
- Agency: Seed IP Law Group PLLC
- Priority: ITTO2008A0876 20081126
- Main IPC: G01C19/56
- IPC: G01C19/56

Abstract:
An integrated microelectromechanical structure is provided with: a die, having a substrate and a frame, defining inside it a detection region and having a first side extending along a first axis; a driving mass, anchored to the substrate, set in the detection region, and designed to be rotated in a plane with a movement of actuation about a vertical axis; and a first pair and a second pair of first sensing masses, suspended inside the driving mass via elastic supporting elements so as to be fixed with respect thereto in the movement of actuation and so as to perform a detection movement of rotation out of the plane in response to a first angular velocity; wherein the first sensing masses of the first pair and the first sensing masses of the second pair are aligned in respective directions, having non-zero inclinations of opposite sign with respect to the first axis.
Public/Granted literature
- US20130180334A1 MICROELECTROMECHANICAL GYROSCOPE WITH ROTARY DRIVING MOTION AND IMPROVED ELECTRICAL PROPERTIES Public/Granted day:2013-07-18
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