Invention Grant
US08716081B2 Capacitor top plate over source/drain to form a 1T memory device
有权
源极/漏极上的电容器顶板形成1T存储器件
- Patent Title: Capacitor top plate over source/drain to form a 1T memory device
- Patent Title (中): 源极/漏极上的电容器顶板形成1T存储器件
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Application No.: US11686475Application Date: 2007-03-15
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Publication No.: US08716081B2Publication Date: 2014-05-06
- Inventor: Lee Wee Teo , Yong Meng Lee , Zhao Lun , Chung Woh Lai , Shyue Seng Tan , Jeffrey Chee , Shailendra Mishra , Johnny Widodo
- Applicant: Lee Wee Teo , Yong Meng Lee , Zhao Lun , Chung Woh Lai , Shyue Seng Tan , Jeffrey Chee , Shailendra Mishra , Johnny Widodo
- Applicant Address: SG Singapore
- Assignee: Globalfoundries Singapore Pte. Ltd.
- Current Assignee: Globalfoundries Singapore Pte. Ltd.
- Current Assignee Address: SG Singapore
- Agency: Horizon IP Pte. Ltd.
- Main IPC: H01L29/76
- IPC: H01L29/76

Abstract:
A method and structure for a memory device, such as a 1T-SRAM, having a capacitor top plate directly over a doped bottom plate region. An example device comprises the following. An isolation film formed as to surround an active area on a substrate. A gate dielectric and gate electrode formed over a portion of the active area. A source element and a drain element in the substrate adjacent to the gate electrode. The drain element is comprised of a drain region and a bottom plate region. The drain region is between the bottom plate region and the gate structure. A capacitor dielectric and a capacitor top plate are over at least portions of the bottom plate region.
Public/Granted literature
- US20080224228A1 CAPACITOR TOP PLATE OVER SOURCE/DRAIN TO FORM A 1T MEMORY DEVICE Public/Granted day:2008-09-18
Information query
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