Invention Grant
US08716081B2 Capacitor top plate over source/drain to form a 1T memory device 有权
源极/漏极上的电容器顶板形成1T存储器件

Capacitor top plate over source/drain to form a 1T memory device
Abstract:
A method and structure for a memory device, such as a 1T-SRAM, having a capacitor top plate directly over a doped bottom plate region. An example device comprises the following. An isolation film formed as to surround an active area on a substrate. A gate dielectric and gate electrode formed over a portion of the active area. A source element and a drain element in the substrate adjacent to the gate electrode. The drain element is comprised of a drain region and a bottom plate region. The drain region is between the bottom plate region and the gate structure. A capacitor dielectric and a capacitor top plate are over at least portions of the bottom plate region.
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