发明授权
- 专利标题: Liquid processing apparatus and liquid processing method
- 专利标题(中): 液体处理装置和液体处理方法
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申请号: US13811522申请日: 2011-07-12
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公开(公告)号: US08636915B2公开(公告)日: 2014-01-28
- 发明人: Yasushi Takiguchi , Taro Yamamoto , Tsutomu Yamahata , Akihiro Fujimoto , Kouji Fujimura
- 申请人: Yasushi Takiguchi , Taro Yamamoto , Tsutomu Yamahata , Akihiro Fujimoto , Kouji Fujimura
- 申请人地址: JP Minato-Ku
- 专利权人: Tokyo Electron Limited
- 当前专利权人: Tokyo Electron Limited
- 当前专利权人地址: JP Minato-Ku
- 代理机构: Burr & Brown, PLLC
- 优先权: JP2010-166067 20100723
- 国际申请: PCT/JP2011/065869 WO 20110712
- 国际公布: WO2012/011411 WO 20120126
- 主分类号: B44C1/22
- IPC分类号: B44C1/22 ; C03C15/00 ; C03C25/68 ; C23F1/00
摘要:
To provide a liquid processing apparatus capable of processing substrates with a high throughput with the lesser number of nozzles for chemical-liquid, when the substrates that are horizontally held in cup bodies are liquid-processed by supplying a chemical liquid to the substrates. Taking a developing process as an example of a liquid process, two-types of developing nozzles are prepared for two types of developing methods. The developing nozzle, which is used in the method in which the nozzle is engaged with the process for a longer period of time, is individually disposed on each of a first processing module 1 and a second processing module 2. On the other hand, the developing nozzle, which is used in the method in which the nozzle is engaged with the process for a shorter period of time, is used in common in the first liquid processing module 1 and the second liquid processing module 2. The common developing nozzle is configured to wait on an intermediate position between the modules 1 and 2.
公开/授权文献
- US20130118533A1 LIQUID PROCESSING APPARATUS AND LIQUID PROCESSING METHOD 公开/授权日:2013-05-16
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