Invention Grant
US08574958B2 Method for manufacturing a gate-control diode semiconductor memory device
有权
栅极控制二极管半导体存储器件的制造方法
- Patent Title: Method for manufacturing a gate-control diode semiconductor memory device
- Patent Title (中): 栅极控制二极管半导体存储器件的制造方法
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Application No.: US13535032Application Date: 2012-06-27
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Publication No.: US08574958B2Publication Date: 2013-11-05
- Inventor: Pengfei Wang , Xiaoyong Liu , Qingqing Sun , Wei Zhang
- Applicant: Pengfei Wang , Xiaoyong Liu , Qingqing Sun , Wei Zhang
- Applicant Address: CN Shanghai
- Assignee: Fudan University
- Current Assignee: Fudan University
- Current Assignee Address: CN Shanghai
- Agency: Jenkins, Wilson, Taylor & Hunt, P.A.
- Priority: CN201210001500 20120105
- Main IPC: H01L21/00
- IPC: H01L21/00

Abstract:
This invention belongs to semiconductor device manufacturing field and discloses a method for manufacturing a gate-control diode semiconductor storage device. When the floating gate voltage is relatively high, the channel under the floating gate is of n type and a simple gate-control pn junction structure is configured; by controlling effective n-type concentration of the ZnO film through back-gate control, inverting the n-type ZnO into p-type through a floating gate and using NiO as a p-type semiconductor, an n-p-n-p doping structure is formed while the quantity of charges in the floating gate determines the device threshold voltage, thus realizing memory functions. This invention features capacity of manufacturing gate-control diode memory devices able to reduce the chip power consumption through advantages of high driving current and small sub-threshold swing. This invention is applicable to semiconductor devices manufacturing based on flexible substrate and flat panel displays and floating gate memories, etc.
Public/Granted literature
- US20130178014A1 METHOD FOR MANUFACTURING A GATE-CONTROL DIODE SEMICONDUCTOR MEMORY DEVICE Public/Granted day:2013-07-11
Information query
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