Invention Grant
- Patent Title: Water-rich stripping and cleaning formulation and method for using same
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Application No.: US12859624Application Date: 2010-08-19
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Publication No.: US08518865B2Publication Date: 2013-08-27
- Inventor: Madhukar Bhaskara Rao , Gautam Banerjee , Thomas Michael Wieder , Yi-Chia Lee , Wen Dar Liu , Aiping Wu
- Applicant: Madhukar Bhaskara Rao , Gautam Banerjee , Thomas Michael Wieder , Yi-Chia Lee , Wen Dar Liu , Aiping Wu
- Applicant Address: US PA Allentown
- Assignee: Air Products and Chemicals, Inc.
- Current Assignee: Air Products and Chemicals, Inc.
- Current Assignee Address: US PA Allentown
- Agent Lina Yang
- Main IPC: C11D7/50
- IPC: C11D7/50 ; C11D11/00

Abstract:
The present invention relates to water-rich formulations and the method using same, to remove bulk photoresists, post-etched and post-ashed residues, residues from Al back-end-of-the-line interconnect structures, as well as contaminations. The formulation comprises: hydroxylamine; corrosion inhibitor containing a mixture of alkyl dihydroxybenzene and hydroxyquinoline; an alkanolamine, a water-soluble solvent or the combination of the two; and at least 50% by weight of water.
Public/Granted literature
- US20110212866A1 WATER-RICH STRIPPING AND CLEANING FORMULATION AND METHOD FOR USING SAME Public/Granted day:2011-09-01
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