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US08497541B2 Memory having buried digit lines and methods of making the same 有权
具有埋置数字线的存储器和制作相同的方法

Memory having buried digit lines and methods of making the same
Abstract:
A memory array having memory cells and methods of forming the same. The memory array may have a buried digit line formed in a first horizontal planar volume, a word line formed in a second horizontal planar volume above the first horizontal planar volume and storage devices formed on top of the vertical access devices, such as finFETs, in a third horizontal planar volume above the second horizontal planar volume. The memory array may have a 4F2 architecture, wherein each memory cell includes two vertical access devices, each coupled to a single storage device.
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