Invention Grant
- Patent Title: Electron spectroscopy
- Patent Title (中): 电子光谱学
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Application No.: US12482577Application Date: 2009-06-11
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Publication No.: US08481931B2Publication Date: 2013-07-09
- Inventor: Simon Page
- Applicant: Simon Page
- Applicant Address: GB Manchester
- Assignee: Kratos Analytical Limited
- Current Assignee: Kratos Analytical Limited
- Current Assignee Address: GB Manchester
- Agency: Squire, Sanders (US) LLP
- Priority: GB0810723.7 20080611
- Main IPC: G21K5/00
- IPC: G21K5/00 ; H01J37/26

Abstract:
The present invention provides an electron spectroscopy apparatus (12) comprising a high energy particle source (12) for irradiating a sample, an electron detector system (16) (e.g. including a delay line detector) for detecting electrons emitted from the sample and an ion gun (8) for delivering a polycyclic aromatic hydrocarbon (PAH) ion beam to the sample, wherein the ion gun comprises a polycyclic aromatic hydrocarbon ion source, for example comprising coronene. In an embodiment, the PAH is located in a heated chamber (22) and vaporised to produce gas phase PAH. The gas phase PAH molecules are then ionised by electron impact, extracted from the ion source via an extraction field and focussed using ion optics. The PAH ion beam can be used for surface cleaning and depth analysis.
Public/Granted literature
- US20090309023A1 ELECTRON SPECTROSCOPY Public/Granted day:2009-12-17
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