发明授权
US08467548B2 Miniature micro-electromechanical system (MEMS) based directional sound sensor
有权
微型微机电系统（MEMS）定向声传感器
- 专利标题： Miniature micro-electromechanical system (MEMS) based directional sound sensor
- 专利标题（中）： 微型微机电系统（MEMS）定向声传感器
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申请号： US12756040申请日： 2010-04-07
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公开(公告)号： US08467548B2公开(公告)日： 2013-06-18
- 发明人: Gamani Karunasiri , Jose Sinibaldi
- 申请人： Gamani Karunasiri , Jose Sinibaldi
- 申请人地址： US DC Washington
- 专利权人： The United States of America as represented by the Secretary of the Navy
- 当前专利权人： The United States of America as represented by the Secretary of the Navy
- 当前专利权人地址： US DC Washington
- 代理商 Lisa A. Norris
- 主分类号： H04R3/00
- IPC分类号： H04R3/00 ; H04R19/04 ; H04R3/005 ; H04R1/406 ; H04R9/08 ; H04R1/40
摘要：
A micro-electromechanical (MEMS) based directional sound sensor includes a two sensor wings attached to a surrounding support structure by two legs. The support structure is hollow beneath the sensor wings allowing the sensor wings to vibrate in response to sound excitation. In one embodiment, interdigitated comb finger capacitors attached on the sensor wing edges and the support structure enable an electrostatic (capacitive) readout related to the vibrations of the sensor which allows determination of the sound direction.
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