公开(公告)号：US08467548B2

公开(公告)日：2013-06-18

申请号：US12756040

申请日：2010-04-07

申请人： Gamani Karunasiri ,  Jose Sinibaldi

发明人： Gamani Karunasiri ,  Jose Sinibaldi

IPC分类号： H04R3/00 ,  H04R19/04 ,  H04R3/005 ,  H04R1/406 ,  H04R9/08 ,  H04R1/40

CPC分类号： H04R3/00 ,  H01L27/1203 ,  H04R1/406 ,  H04R3/005 ,  H04R9/08 ,  H04R19/04

摘要： A micro-electromechanical (MEMS) based directional sound sensor includes a two sensor wings attached to a surrounding support structure by two legs. The support structure is hollow beneath the sensor wings allowing the sensor wings to vibrate in response to sound excitation. In one embodiment, interdigitated comb finger capacitors attached on the sensor wing edges and the support structure enable an electrostatic (capacitive) readout related to the vibrations of the sensor which allows determination of the sound direction.

摘要翻译： 基于微机电（MEMS）的方向声传感器包括通过两个腿连接到周围支撑结构的两个传感器翼。 支撑结构在传感器翼片下方是中空的，允许传感器翼响应于声音激发而振动。 在一个实施例中，连接在传感器翼缘和支撑结构上的叉指梳状电容器能够实现与传感器的振动有关的静电（电容式）读出，这允许确定声音方向。