发明授权
- 专利标题: Scanning probe-based lithography method
- 专利标题(中): 扫描探针型光刻法
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申请号: US12899817申请日: 2010-10-07
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公开(公告)号: US08387160B2公开(公告)日: 2013-02-26
- 发明人: Michel Despont , Urs T. Duerig , Jane E. Frommer , Bernd W. Gotsmann , James L. Hedrick , Craig Jon Hawker , Robert D. Miller
- 申请人: Michel Despont , Urs T. Duerig , Jane E. Frommer , Bernd W. Gotsmann , James L. Hedrick , Craig Jon Hawker , Robert D. Miller
- 申请人地址: US NY Armonk
- 专利权人: International Business Machines Corporation
- 当前专利权人: International Business Machines Corporation
- 当前专利权人地址: US NY Armonk
- 代理机构: Cantor Colburn LLP
- 代理商 Pete Tennant
- 主分类号: G01Q60/24
- IPC分类号: G01Q60/24
摘要:
A resist medium in which features are lithographically produced by scanning a surface of the medium with an AFM probe positioned in contact therewith. The resist medium comprises a substrate; and a polymer resist layer within which features are produced by mechanical action of the probe. The polymer contains thermally reversible crosslinkages. Also disclosed are methods that generally includes scanning a surface of the polymer resist layer with an AFM probe positioned in contact with the resist layer, wherein heating the probe and a squashing-type mechanical action of the probe produces features in the layer by thermally reversing the crosslinkages.
公开/授权文献
- US20110020533A1 SCANNING PROBE-BASED LITHOGRAPHY METHOD 公开/授权日:2011-01-27
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