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US08288020B2 Piezoelectric thin film and method of manufacturing the same, ink jet head, method of forming image with the ink jet head, angular velocity sensor, method of measuring angular velocity with the angular velocity sensor, piezoelectric generating element, and method of generating electric power with the piezoelectric generating element 有权
压电薄膜及其制造方法，喷墨头，用喷墨头形成图像的方法，角速度传感器，角速度传感器测量角速度的方法，压电发生元件，以及用于产生电力的方法 压电发生元件

Piezoelectric thin film and method of manufacturing the same, ink jet head, method of forming image with the ink jet head, angular velocity sensor, method of measuring angular velocity with the angular velocity sensor, piezoelectric generating element, and method of generating electric power with the piezoelectric generating element
Abstract:
Provided are a piezoelectric thin film including a lead-free ferroelectric material and exhibiting high piezoelectric performance comparable to that of lead zirconate titanate (PZT), and a method of manufacturing the piezoelectric thin film. The piezoelectric thin film of the present invention comprises: a LaNiO3 film having a (001) orientation; a NaNbO3 film having a (001) orientation; and a (Bi, Na, Ba) TiO3 film having a (001) orientation. The LaNiO3 film, the NaNbO3 film, and the (Bi, Na, Ba)TiO3 film are laminated in this order.
Abstract(Chinese):

提供了一种包括无铅铁电材料并表现出与锆钛酸铅（PZT）相当的高压电性能的压电薄膜，以及制造压电薄膜的方法。 本发明的压电薄膜包括：具有（001）取向的LaNiO3膜; 具有（001）取向的NaNbO 3膜; 和具有（001）取向的（Bi，Na，Ba）TiO 3膜。 依次层叠LaNiO3膜，NaNbO3膜，（Bi，Na，Ba）TiO3膜。

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