发明授权
- 专利标题: Dual-stage switching system for lithographic machine
- 专利标题(中): 光刻机双级开关系统
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申请号: US12669671申请日: 2008-03-14
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公开(公告)号: US08284380B2公开(公告)日: 2012-10-09
- 发明人: Yu Zhu , Ming Zhang , Jinsong Wang , Guang Li , Dengfeng Xu , Wensheng Yin , Guanghong Duan , Kaiming Yang
- 申请人: Yu Zhu , Ming Zhang , Jinsong Wang , Guang Li , Dengfeng Xu , Wensheng Yin , Guanghong Duan , Kaiming Yang
- 申请人地址: CN Beijing
- 专利权人: Tsinghua University
- 当前专利权人: Tsinghua University
- 当前专利权人地址: CN Beijing
- 代理机构: RatnerPrestia
- 优先权: CN200710119275 20070719
- 国际申请: PCT/CN2008/000502 WO 20080314
- 国际公布: WO2009/009947 WO 20090122
- 主分类号: G03B27/42
- IPC分类号: G03B27/42 ; G03B27/58 ; H02K41/02
摘要:
A dual-stage switching system for lithographic machine includes a wafer stage to be operated in an exposure station and another wafer stage to be operated in a pre-processing station. The two wafer stages are provided on a base, with four 2-DOF driving units capable of moving along X direction and Y direction being provided along the edge of the base, and the wafer stages being disposed in a space surrounded by the four 2-DOF driving units and suspended on an upper surface of the base by air bearings. Each of the 2-DOF driving units includes upper and lower linear guides and a guiding sleeve, with the upper and lower linear guides being installed vertical to each other in their corresponding guiding sleeve. Two adjacent 2-DOF driving units cooperatively drive the wafer stage) to move in the X direction and Y direction.
公开/授权文献
- US20100208227A1 DUAL-STAGE SWITCHING SYSTEM FOR LITHOGRAPHIC MACHINE 公开/授权日:2010-08-19
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